The visitors were on top for long spells of the game but they were denied any reward for their efforts by tough defending and Oldham's Australian keeper Leslie Pogliacomi.
Oldham could have scored in the first minute when Dean Holden headed at the keeper but their second chance arrived only three minutes later from a corner.
The flag kick form the left was swung in by Neil Kilkenny and centre-back Will Haining scored from six yards with a thumping header.
Huddersfield hit back only three minutes later when Anthony Lloyd crossed from the right and impressive striker Pawel Abbott got between Pogliacomi and his defence to guide in a header from eight yards.
Pogliacomi made a superb stop from Chris Brandon while Oldham grabbed the lead back seven minutes before the break when Kevin Betsy claimed his second goal in the space of a week.
Betsy got on the end of a flick from Chris Killen and converted it in style with an overhead kick from close range.
Huddersfield dominated most of the second half as former Oldham favourite Tony Carss fired wide, sub Danny Schofield saw his shot touched against the post and Pogliacomi saved from Junior Mendes.
Huddersfield thought they should have had a penalty when Mendes tangled with the keeper but their day was summed up in stoppage time when Pogliacomi saved a Jonathan Worthington effort.